Oxygen transport and reaction mechanisms in rhenium gate contacts on hafnium oxide films on Si
- R.P. Pezzi
- M. Copel
- et al.
- 2006
- Applied Physics Letters
Paper
Publications
48 results for Michael S. Gordon
Ultrathin membrane, masks for electron projection lithography
- O.R. Wood II
- W.J. Trybula
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paperMeasurement of the flux and energy spectrum of cosmic-ray induced neutrons on the ground
- M. Gordon
- P. Goldhagen
- et al.
- 2004
- IEEE TNS
PaperSRAM SER in 90, 130 and 180 NM bulk and SOI technologies
- Ethan H. Cannon
- Daniel D. Reinhardt
- et al.
- 2004
- IRPS 2004
Conference paperSRAM ser in 90, 130 and 180 nm bulk and SOI technologies
- Ethan H. Cannon
- Daniel D. Reinhardt
- et al.
- 2004
- IRPS 2004
Conference paperPREVAIL-EPL alpha tool: Early results
- S.D. Golladay
- H.C. Pfeiffer
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperProjection reduction exposure with variable axis immersion lenses: Next generation lithography
- H.C. Pfeiffer
- R.S. Dhaliwal
- et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperPREVAIL: Operation of the electron optics proof-of-concept system
- M. Gordon
- J.E. Lieberman
- et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper