Fabrication challenges for next-generation devices: Microelectromechanical systems for radio-frequency wireless communications
- David Seeger
- Jennifer Lund
- et al.
- 2003
- Journal of Microlithography, Microfabrication and Microsystems
Paper
Publications
91 results for Christopher V. Jahnes
80 nm gate-length Si/Si0.7Ge0.3 n-MODFET with 194 GHz fmax
- S.J. Koester
- K.L. Saenger
- et al.
- 2003
- Electronics Letters
PaperFabrication challenges for next generation devices: MEMS for RF wireless communications
- David Seeger
- Jennifer Lund
- et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
PaperTribological and mechanical properties of diamond-like carbon prepared by high-density plasma
- J.C. Sánchez-López
- C. Donnet
- et al.
- 2001
- Diamond and Related Materials
PaperDiamond-like carbon prepared by high density plasma
- J.C. Sánchez-López
- C. Donnet
- et al.
- 2000
- Diamond and Related Materials
PaperLow dielectric constant SiCOH films as potential candidates for interconnect dielectrics
- A. Grill
- L. Perraud
- et al.
- 1999
- MRS Spring Meeting 1999
PaperSolid state 13C and 1H nuclear magnetic resonance investigations of hydrogenated amorphous carbon
- C. Donnet
- J. Fontaine
- et al.
- 1999
- Journal of Applied Physics
PaperLayered TaSiN as an oxidation resistant electrically conductive barrier
- A. Grill
- C.V. Jahnes
- et al.
- 1999
- Journal of Materials Research
PaperIntegration issues for diamond like carbon in a copper damascene process flow
- A. Grill
- C.V. Jahnes
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperMeasurement of the magnetostriction constants of amorphous thin films on kapton substrates
- C. Ouyang
- T.W. Kim
- et al.
- 1998
- Journal of Applied Physics
Paper