A Multiscale Simulation Study of the Structural Integrity of Damascene Interconnects in Advanced Technology Nodes
- Sagarika Mukesh
- Nicholas A. Lanzillo
- 2023
- IEEE T-ED
Paper
Publications
6 results for Sagarika Mukesh
A Review of the Gate-All-Around Nanosheet FET Process Opportunities
- Sagarika Mukesh
- Jingyun Zhang
- 2022
- Electronics (Switzerland)
PaperMetal-induced line width variability challenge and mitigation strategy in advanced post-Cu interconnects
- Koichi Motoyama
- Nicholas A. Lanzillo
- et al.
- 2022
- IITC 2022
Conference paperPredicting overlay mark performance based on process emulation and optical simulation
- Sagarika Mukesh
- Jack Wong
- et al.
- 2022
- SPIE Advanced Lithography 2022
Conference paperCritical Elements for Next Generation High Performance Computing Nanosheet Technology
- R. Bao
- C. Durfee
- et al.
- 2021
- IEDM 2021
Conference paperSimulation of photoresist defect transfer through subsequent patterning processes
- Dominik Metzler
- Mohamed Oulmane
- et al.
- 2020
- SPIE Advanced Lithography 2020
Conference paper