A novel ALD SiBCN low-k spacer for parasitic capacitance reduction in FinFETs
- Tenko Yamashita
- S. Mehta
- et al.
- 2015
- VLSI Technology 2015
Conference paper
Publications
47 results for Richard G. Southwick
Reliability challenges for the 10nm node and beyond
- 2014
- IEDM 2014
Conference paperFrequency-modulated charge pumping with extremely high gate leakage
- Jason T. Ryan
- Jibin Zou
- et al.
- 2015
- IEEE T-ED
PaperSOI FinFET versus bulk FinFET for 10nm and below
- Terence B. Hook
- F. Allibert
- et al.
- 2014
- S3S 2014
Conference paper10nm FINFET technology for low power and high performance applications
- D. Guo
- H. Shang
- et al.
- 2014
- ICSICT 2014
Conference paperConstant shape factor frequency modulated charge pumping (FMCP)
- J.T. Ryan
- J.P. Campbell
- et al.
- 2013
- IIRW 2013
Conference paperReliability monitoring for highly leaky devices
- J.T. Ryan
- J.P. Campbell
- et al.
- 2013
- IRPS 2013
Conference paper