Publications

2 results for Yutaka Kodera

Printability of buried extreme ultraviolet lithography photomask defects
- - Kazunori Seki
  - Takeshi Isogawa
  - et al.
- 2016
- J. Micro/Nanolithogr. MEMS MOEMS
Paper
SMO photomask inspection in the lithographic plane
- - Emily Gallagher
  - Karen Badger
  - et al.
- 2009
- SPIE Photomask Technology + EUV Lithography 2009
Conference paper