Publications

2 results for Brian A. Cohen

Non-Contact, Sub-Surface Detection of Alloy Segregation in Back-End of Line Copper Dual-Damascene Structures
- - Joyeeta Nag
  - S. Ray
  - et al.
- 2015
- IEEE Trans Semicond Manuf
Paper
ALD TaN barrier for enhanced performance with low contact resistance for 14 nm Technology Node Cu Interconnects
- - Joyeeta Nag
  - Brian A. Cohen
  - et al.
- 2015
- ECS Meeting 2015 Phoenix
Conference paper