Progress towards the integration of optical proximity correction and directed self-assembly of block copolymers with graphoepitaxy
- Chi-Chun Liu
- Jed Pitera
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paper
Publications
13 results for Melia Tjio
Nanogel star polymer architectures: A nanoparticle platform for modular programmable macromolecular self-assembly, intercellular transport, and dual-mode cargo delivery
- Victor Y. Lee
- Karen Havenstrite
- et al.
- 2011
- Advanced Materials
PaperSelf-assembly patterning for sub-15nm half-pitch: A transition from lab to fab
- Chris Bencher
- Jeffrey Smith
- et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paper