177 results for
Geoffrey W. Burr- I.A. Ibrahim
- M. Mivelle
- et al.
- 2010
- Optics Letters
Paper
- M. Mivelle
- I.A. Ibrahim
- et al.
- 2010
- Optics Express
Paper
- T. Grosjean
- I.A. Ibrahim
- et al.
- 2010
- Optics Express
Paper
- David Melville
- Alan E. Rosenbluth
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paper
- T. Grosjean
- M. Mivelle
- et al.
- 2010
- Optics Letters
Paper
- Geoffrey W. Burr
- Matthew J. Breitwisch
- et al.
- 2010
- Journal of Vacuum Science and Technology B
Paper
- Jaione Tirapu Azpiroz
- Alan E. Rosenbluth
- et al.
- 2009
- SPIE Photomask Technology + EUV Lithography 2009
Conference paper
- Bong-Sub Lee
- Geoffrey W. Burr
- et al.
- 2009
- Science
Paper
- Daniel Krebs
- Simone Raoux
- et al.
- 2009
- Journal of Applied Physics
Paper
- Daniel Krebs
- Simone Raoux
- et al.
- 2009
- Applied Physics Letters
Paper