The effect of material and process interactions on BEOL integration
- T. Spooner
- J.C. Arnold
- et al.
- 2009
- ECS Meeting 2009
Conference paper
Publications
13 results for Satyavolu S. Papa Rao
Copper contact metallization for 22 nm and beyond
- Soon-Cheon Seo
- Chih-Chao Yang
- et al.
- 2009
- IITC 2009
Conference paperA comparative study of ceria-based and silica-based slurries for 32 nm shallow trench isolation chemical mechanical planarization
- Jason E. Cummings
- Matthew D. Smalley
- et al.
- 2008
- CMP-MIC 2008
Conference paper