0.026μm2 high performance Embedded DRAM in 22nm technology for server and SOC applicationsC. PeiG. Wanget al.2014IEDM 2014Conference paper
Scaling deep trench based eDRAM on SOI to 32nm and beyondG. WangD. Anandet al.2009IEDM 2009Conference paper
A 45nm low power bulk technology featuring carbon co-implantation and laser anneal on 45°-rotated substrateJ. YuanV. Chanet al.2008ICSICT 2008Conference paper
High performance transistors featured in an aggressively scaled 45nm bulk CMOS technologyZ. LuoN. Rovedoet al.2007VLSI Technology 2007Conference paper