Implementation of assist features in EUV lithography
- Fan Jiang
- Martin Burkhardt
- et al.
- 2015
- SPIE Advanced Lithography 2015
Conference paper
Publications
2 results for Andres Torres
A designer's guide to subresolution lithography: Enabling the impossible to get to the 14-nm node
- Lars Liebmann
- J. Andres Torres
- 2013
- IEEE Design and Test
Paper