In-line XPS metrology for area selective deposition processes on patterned structures
- Manasa Medikonda
- Linda Wangoh
- et al.
- 2026
- SPIE Advanced Lithography + Patterning 2026
Conference paper
Publications
3 results for Manasa Medikonda
Evaluation of In-line SIMS Impact on Device Reliability and Performance
- Jander Cruz
- Li Xiang
- et al.
- 2026
- SPIE Advanced Lithography + Patterning 2026
Conference paperScatterometry based methodologies for characterization of MRAM technology
- Manasa Medikonda
- Daniel Schmidt
- et al.
- 2022
- SPIE Advanced Lithography 2022
Conference paper