Publications

4 results for Matthew Shoudy

The Extreme Extendibility of Cu and Post-Cu Dual Damascene BEOL Interconnect Technology
- - Daniel Edelstein
  - Son Nguyen
  - et al.
- 2024
- IEDM 2024
Invited talk
Evaluation of different metal preclean conditions for MOL for 2nm and beyond
- - Samuel Swaroop Munnangi
  - Andrew Simon
  - et al.
- 2024
- ASMC 2024
Conference paper
Optimization of Area Selective Barrier on Different Metal Interconnects
- - Linda Wangoh
  - Andrew Simon
  - et al.
- 2024
- ASMC 2024
Talk
Flowable Chemical Vapor Deposition of Lightly Porous Low k SiCOH Dielectrics—Remote Plasma Deposition Processing, Film Analysis and Gap-Fill Application in Nano Device Fabrication
- - Son Nguyen
  - Thomas Haigh
  - et al.
- 2022
- MRS Fall Meeting 2022
Talk