Non-intrusive mapping of subsurface defects in semiconductors
- D. Guidotti
- M.A. Taubenblatt
- et al.
- 1992
- Applied Physics A Solids and Surfaces
Paper
Publications
38 results for Marc A. Taubenblatt
Patterned wafer inspection using spatial filtering for the cluster environment
- M.A. Taubenblatt
- J.S. Batchelder
- 1992
- Applied Optics
PaperMeasurement of the size and refractive index of a small particle using the complex forward-scattered electromagnetic field
- M.A. Taubenblatt
- J.S. Batchelder
- 1991
- Applied Optics
PaperInvestigation of particle pairing in liquids
- Douglas W Cooper
- J.Samuel Batchelder
- et al.
- 1991
- Journal of Colloid And Interface Science
PaperLight scattering from cylindrical structures on surfaces
- M.A. Taubenblatt
- 1990
- Optics Letters
PaperInterferometric detection of forward scattered light from small particles
- J.S. Batchelder
- M.A. Taubenblatt
- 1989
- Applied Physics Letters
PaperLateral forces and topography using scanning tunneling microscopy with optical sensing of the tip position
- Marc A. Taubenblatt
- 1989
- Applied Physics Letters
PaperPhotothermal absorption microprobe: Infrared spectroscopy of a single 1 μm organic particle
- Marc A. Taubenblatt
- 1988
- Applied Physics Letters
Paper