Texture formation in Ti-Ta alloy disilicide thin films
- A.S. Özcan
- K.F. Ludwig Jr.
- et al.
- 2002
- Journal of Applied Physics
Paper
Publications
162 results for Cyril Cabral
Texture of TiSi 2 thin films on Si (001)
- A.S. Özcan
- K.F. Ludwig Jr.
- et al.
- 2002
- Journal of Applied Physics
PaperNucleation and growth kinetics of preferred C54 TiSi 2 orientations: Time-resolved x-ray diffraction measurements
- A.S. Özcan
- K.F. Ludwig Jr.
- et al.
- 2002
- Journal of Applied Physics
PaperPhase transformation of thin sputter-deposited tungsten films at room temperature
- S.M. Rossnagel
- I.C. Noyan
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperDiffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition
- H. Kim
- C. Cabral
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperA method for measuring barrier heights, metal work functions and fixed charge densities in metal/SiO2/Si capacitors
- Sufi Zafar
- Cyril Cabral Jr.
- et al.
- 2002
- Applied Physics Letters
PaperMetastable and equilibrium phase formation in sputter-deposited Ti/Al multilayer thin films
- G.A. Lucadamo
- K. Barmak
- et al.
- 2002
- Journal of Applied Physics
PaperCharacterization and monitoring of silicon-on-insulator fabrication processes by high-resolution x-ray diffraction
- G.M. Cohen
- P.M. Mooney
- et al.
- 2002
- MRS Proceedings 2002
Conference paperCu and dilute binary Cu(Ti), Cu(Sn) and Cu(Al) thin films: Texture, grain growth and resistivity
- A. Gungor
- K. Barmak
- et al.
- 2002
- MRS Proceedings 2002
Conference paperIn-situ studies of silicide formation in Ti-Ta bilayer thin films on poly-Si
- A.S. Özcan
- K.F. Ludwig Jr.
- et al.
- 2002
- MRS Proceedings 2002
Conference paper