E-beam hot spot inspection for early detection of systematic patterning problems for a 22 nm SOI technology
- Oliver D. Patterson
- Deborah A. Ryan
- et al.
- 2014
- IEEE Trans Semicond Manuf
Paper
Publications
10 results for Dominique Nguyen-Ngoc
Early detection of systematic patterning problems for a 22nm SOI technology using E-beam hot spot inspection
- Oliver D. Patterson
- Deborah A. Ryan
- et al.
- 2013
- ASMC 2013
Conference paperNovel substrate contact structure for high-Q silicon-integrated spiral inductors
- J.N. Burghartz
- A.E. Ruehli
- et al.
- 1997
- IEDM 1997
Conference paperManufacturability demonstration of an integrated SiGe HBT technology for the analog and wireless marketplace
- D. Ahlgren
- M.M. Gilbert
- et al.
- 1996
- IEDM 1996
Conference paperA Si-Ge HBT technology for the wireless marketplace
- D. Ahlgren
- D.A. Sunderland
- et al.
- 1996
- ESSDERC 1996
Conference paperA manufacturable poly-emitter graded-SiGe HBT technology for wireless and mixed-signal applications
- D. Nguyen-Ngoc
- D.A. Sunderland
- et al.
- 1996
- Applied Surface Science
PaperSi-Ge heterojunction bipolar technology for high-speed integrated circuits
- D. Ahlgren
- M.M. Gilbert
- et al.
- 1996
- Canadian Journal of Physics
Paper200 mm SiGe-HBT technology for wireless and mixed-signal applications
- D.L. Harame
- K. Schonenberg
- et al.
- 1994
- IEDM 1994
Conference paperAPCVD-grown self-aligned SiGe-base HBTs
- J.N. Burghartz
- T.O. Sedgwick
- et al.
- 1993
- BCTM 1993
Conference paperCharacterization of devices fabricated in films grown at low temperature by atmospheric pressure CVD
- T.O. Sedgwick
- V.P. Kesan
- et al.
- 1991
- IEDM 1991
Conference paper