Advanced junction formation for Sub-32nm logic devices
- Sadanand V. Deshpande
- Ahmet Ozcan
- et al.
- 2010
- IWJT 2010
Conference paper
Publications
33 results for Ahmet S. Ozcan
Sharp reduction of contact resistivities by effective schottky barrier lowering with silicides as diffusion sources
- Zhen Zhang
- F. Pagette
- et al.
- 2010
- IEEE Electron Device Letters
PaperStrained Si channel MOSFETs with embedded silicon carbon formed by solid phase epitaxy
- Yaocheng Liu
- Oleg Gluschenkov
- et al.
- 2007
- VLSI Technology 2007
Conference paperNi-Pt silicide formation through Ti mediating layers
- Paul Besser
- Christian Lavoie
- et al.
- 2007
- Microelectronic Engineering
PaperEvaluation of thermal stability for CMOS gate metal materials
- C. Cabral Jr.
- C. Lavoie
- et al.
- 2004
- JES
PaperEvolution of microstructure in Ti-Ta bilayer thin films on polycrystalline-Si and Si(001)
- A.S. Özcan
- K.F. Ludwig Jr.
- et al.
- 2004
- Thin Solid Films
PaperTexture of tetragonal α-FeSi2 films on Si(001)
- C. Detavernier
- C. Lavoie
- et al.
- 2004
- Physical Review B - CMMP
PaperAn off-normal fibre-like texture in thin films on single-crystal substrates
- C. Detavernier
- A.S. Özcan
- et al.
- 2003
- Nature
PaperKinetics of agglomeration of NiSi and NiSi2 phase formation
- C. Detavernier
- A.S. Özcan
- et al.
- 2002
- MRS Proceedings 2002
Conference paperTexture formation in Ti-Ta alloy disilicide thin films
- A.S. Özcan
- K.F. Ludwig Jr.
- et al.
- 2002
- Journal of Applied Physics
Paper