Detection of charge carrier confinement into mobile ionic defects in nanoporous dielectric films for advanced interconnects
- Juan Borja
- Joel L. Plawsky
- et al.
- 2014
- JVSTA
Paper
Publications
4 results for Joel L. Plawsky
Processing dependent thermal conductivity of nanoporous silica xerogel films
- Anurag Jain
- Svetlana Rogojevic
- et al.
- 2002
- Journal of Applied Physics
PaperEffects of processing history on the modulus of silica xerogel films
- Anurag Jain
- Svetlana Rogojevic
- et al.
- 2001
- Journal of Applied Physics
PaperPorous silica materials as low-k dielectrics for electronic and optical interconnects
- A. Jain
- S. Rogojevic
- et al.
- 2001
- Thin Solid Films
Paper