Publications

3 results for Neal Lafferty

Computational lithography platform for 193i-guided directed self-assembly
- - Kafai Lai
  - Melih Ozlem
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paper
Computational aspects of optical lithography extension by Directed Self-Assembly
- - Kafai Lai
  - Chi-Chun Liu
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paper
Progress towards the integration of optical proximity correction and directed self-assembly of block copolymers with graphoepitaxy
- - Chi-Chun Liu
  - Jed Pitera
  - et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paper