111 results for
Hugo Rothuizen- M. Despont
- J. Brugger
- et al.
- 1999
- MEMS 1999
Conference paper
- H.P. Lang
- M.K. Baller
- et al.
- 1999
- MEMS 1999
Conference paper
- P. Vettiger
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- et al.
- 1999
- Microelectronic Engineering
Paper
- 1999
- Semiconductor Science and Technology
Paper
- Christophe Fumeaux
- Glenn D. Boreman
- et al.
- 1999
- Applied Optics
Paper
- G.D. Boreman
- C. Fumeaux
- et al.
- 1998
- Optics Letters
Paper
- C. Fumeaux
- Fritz K. Kneubühl
- et al.
- 1998
- Proceedings of SPIE - The International Society for Optical Engineering
Conference paper
- C. Fumeaux
- W. Herrmann
- et al.
- 1998
- MSMW 1998
Conference paper
- E. Delamarche
- H. Schmid
- et al.
- 1998
- Journal of Physical Chemistry B
Paper
- M. Willemin
- C. Rossel
- et al.
- 1998
- Journal of Applied Physics
Paper