Cracking behavior of evaporated amorphous silicon films
- Jeehwan Kim
- Daniel Inns
- et al.
- 2010
- Thin Solid Films
Paper
Publications
188 results for Devendra Sadana
Investigation on critical failure thickness of hydrogenated/nonhydrogenated amorphous silicon films
- Jeehwan Kim
- Daniel Inns
- et al.
- 2010
- Journal of Applied Physics
PaperChallenges and solutions of extremely thin SOI (ETSOI) for CMOS scaling to 22nm node and beyond
- Kangguo Cheng
- Ali Khakifirooz
- et al.
- 2010
- CSTIC 2010
Conference paperStrain engineering for fully-depleted SOI devices
- Ali Khakifirooz
- Pranita Kulkarni
- et al.
- 2010
- ECS Transactions
Conference paperSputtering behavior and evolution of depth resolution upon low energy ion irradiation of GaAs
- Marinus Hopstaken
- Dirk Pfeiffer
- et al.
- 2010
- ECS Transactions
Conference paper300mm cold-wall UHV/CVD reactor for low-temperature epitaxial (100) silicon
- Thomas N. Adam
- Stephen W. Bedell
- et al.
- 2010
- ECS Transactions
Conference paper> 1020 cm-3 n-doping in Ge by Sb/P co-implants: n+/p Diodes with improved rectification
- Jeehwan Kim
- Stephen W. Bedell
- et al.
- 2010
- ECS Transactions
Conference paperLow-temperature epitaxial growth of Si, SiGe, Ge, and SiC in a 300mm UHV/CVD reactor
- Thomas N. Adam
- Stephen W. Bedell
- et al.
- 2010
- ECS Transactions
Conference paperApplications of epitaxy for semiconductor technology
- Devendra Sadana
- Stephen W. Bedell
- et al.
- 2010
- ECS Transactions
Conference paperHigh mobility III-V channel MOSFETs for post-Si CMOS applications
- Yanning Sun
- E.W. Kiewra
- et al.
- 2009
- ICICDT 2009
Conference paper