Publications

3 results for Mikko Ritala

History of atomic layer deposition and its relationship with the American Vacuum Society
- - Gregory N. Parsons
  - Jeffrey W. Elam
  - et al.
- 2013
- JVSTA
Review
Atomic layer deposition of materials for phase-change memories
- - Markku Leskelä
  - Viljami Pore
  - et al.
- 2009
- ECS Meeting 2009
Conference paper
Atomic layer deposition of Ge₂Sb₂Te₅ thin films
- - Mikko Ritala
  - Viljami Pore
  - et al.
- 2009
- Microelectronic Engineering
Paper