A next-generation in-situ nanoprobe beamline for the advanced photon source
- Jörg Maser
- Barry Lai
- et al.
- 2013
- SPIE Optical Engineering + Applications 2013
Conference paper
Publications
4 results for Jörg Maser
Probing strain at the nanoscale with X-ray diffraction in microelectronic materials induced by stressor elements
- Conal E. Murray
- S. Polvino
- et al.
- 2013
- Thin Solid Films
PaperNanoscale silicon-on-insulator deformation induced by stressed liner structures
- Conal E. Murray
- Andrew Ying
- et al.
- 2011
- Journal of Applied Physics
PaperModeling of kinematic diffraction from a thin silicon film illuminated by a coherent, focused X-ray nanobeam
- Andrew Ying
- Braxton Osting
- et al.
- 2010
- Journal of Applied Crystallography
Paper