Publications

45 results for M. Gribelyuk

80 nm poly-silicon gated n-FETs with ultra-thin Al₂O₃ gate dielectric for ULSI applications
- - D.A. Buchanan
  - E. Gusev
  - et al.
- 2000
- IEDM 2000
Conference paper
Atomic beam deposition of lanthanum- and yttrium-based oxide thin films for gate dielectrics
- - S. Guha
  - E. Cartier
  - et al.
- 2000
- Applied Physics Letters
Paper
Low temperature chemical vapor deposition of ZrO₂ on Si(100) using anhydrous zirconium(IV) nitrate
- - Ryan C. Smith
  - Noel Hoilien
  - et al.
- 2000
- JES
Paper
Structure and stability of ultrathin zirconium oxide layers on Si(001)
- - M. Copel
  - M. Gribelyuk
  - et al.
- 2000
- Applied Physics Letters
Paper
High-resolution depth profiling in ultrathin Al₂O₃ films on Si
- - E. Gusev
  - M. Copel
  - et al.
- 2000
- Applied Physics Letters
Paper