Positive tone dry-develop resist based on cross-linking a phenolic resin
- Scott A. MacDonald
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- 1993
- Microlithography 1993
Conference paper
Publications
88 results for Phil Brock
Polyimides with reduced dielectric anisotropy
- Jeff W. Labadie
- H. Lee
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- 1993
- ECTC 1993
Conference paperPoly(aryl ether amide)s
- M. Lucas
- P.J. Brock
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- 1993
- Journal of Polymer Science Part A: Polymer Chemistry
PaperChemical vapor deposition of copper from 1,5-cyclooctadiene copper(I) hexafluoroacetylacetonate
- Scott K. Reynolds
- Christopher J. Smart
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- 1991
- Applied Physics Letters
PaperFabrication of grooved-glass substrates by phase-mask lithography
- P.J. Brock
- M. Levenson
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- 1991
- Microlithography 1991
Conference paperOptimization of real phase-mask performance
- F.M. Schellenberg
- M. Levenson
- et al.
- 1991
- BACUS Symposium on Photomask Technology and Management 1991
Conference paperPhotosensitized polystyrene as a high efficiency relief hologram medium
- F.M. Schellenberg
- C.G. Willson
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperPhotodeformable polymer system for holography.
- C.G. Willson
- F.M. Schellenberg
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- CLEO 1987
Conference paper