Combined C-V/I-V front-end-of-line measurement
- Stas Polonsky
- Simeon Realov
- et al.
- 2012
- ICMTS 2012
Conference paper
Publications
3 results for Jiun-Hsin Liao
Front-end-of-line quadrature-clocked voltage-dependent capacitance measurement
- Stas Polonsky
- Paul Solomon
- et al.
- 2011
- ICMTS 2011
Conference paperNew tools and methodology for advanced parametric and defect structure test
- Raphael Robertazzi
- Louis Medina
- et al.
- 2010
- IEEE ITC 2010
Conference paper