7 results for
S. Bukofsky- Huiling Shang
- Sameer Jain
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- 2012
- VLSI Technology 2012
Conference paper
- 2007
- SPIE Advanced Lithography 2007
Conference paper
- E. Leobandung
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- 2005
- VLSI Technology 2005
Conference paper
- Lars Liebmann
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- 2004
- AMM 2004
Conference paper
- Alan E. Rosenbluth
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- et al.
- 2002
- Journal of Microlithography, Microfabrication and Microsystems
Conference paper
- Scott Halle
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- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper
- Alan E. Rosenbluth
- Scott Bukofsky
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
Paper