Publications

2 results for Norman Chen

Strategies for single patterning of contacts for 32nm and 28nm technology
- - Bradley Morgenfeld
  - Ian Stobert
  - et al.
- 2011
- ASMC 2011
Conference paper
Contact patterning strategies for 32nm and 28nm technology
- - Bradley Morgenfeld
  - Ian Stobert
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paper