Total Source Mask Optimization: High-capacity, resist modeling, and production-ready mask solution
- Moutaz Fakhry
- Yuri Granik
- et al.
- 2011
- SPIE Photomask Technology + EUV Lithography 2011
Conference paper
Publications
4 results for Moutaz Fakhry
Applicability of global source mask optimization to 22/20nm node and beyond
- Kehan Tian
- Moutaz Fakhry
- et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paperDemonstrating the benefits of source-mask optimization and enabling technologies through experiment and simulations
- David Melville
- Alan E. Rosenbluth
- et al.
- 2010
- SPIE Advanced Lithography 2010
Conference paperExperimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography process
- Kafai Lai
- Alan E. Rosenbluth
- et al.
- 2009
- SPIE Advanced Lithography 2009
Conference paper