Publications

4 results for J. Linville

Plasma etch challenges for porous low k materials for 32nm and beyond
- - Catherine Labelle
  - R. Srivastava
  - et al.
- 2011
- CSTIC 2011
Conference paper
UV curing-induced photoresist poisoning in advanced ULK BEOL integration schemes
- - Y.C. Ee
  - D. Kioussis
  - et al.
- 2009
- ADMETA 2009
Conference paper
Porous low-k material etch for 32 nm and beyond
- - Catherine Labelle
  - John Arnold
  - et al.
- 2008
- ADMETA 2008
Conference paper
A SiCOH BEOL interconnect technology for high density and high performance 65 nm CMOS applications
- - Matthew Angyal
  - Jason Gill
  - et al.
- 2005
- AMC 2005
Conference paper