Publications

2 results for Remco Groenendijk

Qualification, monitoring, and integration into a production environment of the world's first fully programmable illuminator
- - Gregory McIntyre
  - Daniel Corliss
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Conference paper
Experimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography process
- - Kafai Lai
  - Alan E. Rosenbluth
  - et al.
- 2009
- SPIE Advanced Lithography 2009
Conference paper