Nanoscale strain characterization in microelectronic materials using X-ray diffraction
- Conal E. Murray
- Andrew Ying
- et al.
- 2012
- Powder Diffraction
Paper
Publications
6 results for Andrew Ying
Nanoscale silicon-on-insulator deformation induced by stressed liner structures
- Conal E. Murray
- Andrew Ying
- et al.
- 2011
- Journal of Applied Physics
PaperA quantitative analysis of room temperature recrystallization kinetics in electroplated copper films using high resolution x-ray diffraction
- Andrew Ying
- Christian Witt
- et al.
- 2011
- Journal of Applied Physics
PaperModeling of kinematic diffraction from a thin silicon film illuminated by a coherent, focused X-ray nanobeam
- Andrew Ying
- Braxton Osting
- et al.
- 2010
- Journal of Applied Crystallography
PaperA rigorous comparison of X-ray diffraction thickness measurement techniques using silicon-on-insulator thin films
- Andrew J. Ying
- Conal E. Murray
- et al.
- 2009
- Journal of Applied Crystallography
PaperStrain measured in a silicon-on-insulator, complementary metal-oxide-semiconductor device channel induced by embedded silicon-carbon source/drain regions
- Conal E. Murray
- Z. Ren
- et al.
- 2009
- Applied Physics Letters
Paper