Modeling of the diffusion of implanted boron in strained Si/Si1-xGex
- Huilong Zhu
- Kam-Leung Lee
- et al.
- 2002
- SISPAD 2002
Conference paper
Publications
15 results for Kam-Leung Lee
New polysilicon disposable sidewall process for sub-50 nm CMOS
- K.L. Lee
- D. Boyd
- et al.
- 2001
- ESSDERC 2001
Conference paperCarbon implanted halo for super halo characteristic NFETs in bulk and SOI
- John Ellis-Monaghan
- Kam-Leung Lee
- et al.
- 2001
- ESSDERC 2001
Conference paperVery high performance 50 nm CMOS at low temperature
- S.J. Wind
- L.T. Shi
- et al.
- 1999
- IEDM 1999
Conference paperSub-30 nm abrupt P+ junction formation with Ge preamorphization and high energy Si co-implantation
- K.L. Lee
- Ted Zabel
- et al.
- 1999
- MRS Spring Meeting 1999
Paper