Directed self-assembly of silicon-containing block copolymer thin films
- Michael J. Maher
- Charles T. Rettner
- et al.
- 2015
- ACS AMI
Paper
Publications
56 results for Joy Y. Cheng
Enabling complex nanoscale pattern customization using directed self-assembly
- Gregory S. Doerk
- Joy Y. Cheng
- et al.
- 2014
- Nature Communications
PaperDirected self-assembly of topcoat-free, Integration-friendly high-χ block copolymers
- Ankit Vora
- Anindarupa Chunder
- et al.
- 2014
- J. Photopolym. Sci. Tech.
PaperDetermination of the internal morphology of nanostructures patterned by directed self assembly
- Daniel F. Sunday
- Matthew R. Hammond
- et al.
- 2014
- ACS Nano
PaperTwo-dimensional pattern formation using graphoepitaxy of PS-b-PMMA block copolymers for advanced FinFET device and circuit fabrication
- Hsinyu Tsai
- Jed W. Pitera
- et al.
- 2014
- ACS Nano
PaperThree-dimensional nanofabrication by block copolymer self-assembly
- Caroline A. Ross
- Karl K. Berggren
- et al.
- 2014
- Advanced Materials
PaperComputational lithography platform for 193i-guided directed self-assembly
- Kafai Lai
- Melih Ozlem
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paperTowards electrical testable soi devices using directed self-assembly for fin formation
- Chi Chun Liu
- Cristina Estrada-Raygoza
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paperPattern transfer of directed self-assembly (DSA) patterns for CMOS device applications
- Hsin-Yu Tsai
- Hiroyuki Miyazoe
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperDirected self-assembly process implementation in a 300mm pilot line environment
- Chi-Chun Liu
- I. Cristina Estrada-Raygoza
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paper