Computational aspects of optical lithography extension by Directed Self-Assembly
- Kafai Lai
- Chi-Chun Liu
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paper
Publications
56 results for Joy Y. Cheng
Deterministically isolated gratings through the directed self-assembly of block copolymers
- Gregory Sadasdf Doerk
- Joy Y. Cheng
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperProgrammable nanoparticle ensembles via high-throughput directed self-assembly
- Qiu Dai
- Yingyu Chen
- et al.
- 2013
- Langmuir
PaperHigh-throughput directed self-assembly of core-shell ferrimagnetic nanoparticle arrays
- Qiu Dai
- Jane Frommer
- et al.
- 2013
- Langmuir
PaperPattern transfer of directed self-assembly patterns for CMOS device applications
- Hsin-Yu Tsai
- Hiroyuki Miyazoe
- et al.
- 2013
- J. Micro/Nanolithogr. MEMS MOEMS
PaperPattern placement accuracy in block copolymer directed self-assembly based on chemical epitaxy
- Gregory S. Doerk
- Chi-Chun Liu
- et al.
- 2012
- ACS Nano
PaperSub-30 nm pitch line-space patterning of semiconductor and dielectric materials using directed self-assembly
- Hsin-Yu Tsai
- Hiroyuki Miyazoe
- et al.
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
PaperMeasurement of placement error between self-assembled polymer patterns and guiding chemical prepatterns
- Gregory S. Doerk
- Chi-Chun Liu
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paperDirected self-assembly defectivity assessment. Part II
- Chris Bencher
- He Yi
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paperProgress towards the integration of optical proximity correction and directed self-assembly of block copolymers with graphoepitaxy
- Chi-Chun Liu
- Jed Pitera
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paper