Device-oriented directed self-assembly of lamella microdomains from a block copolymer containing hybrid
- Ho-Cheol Kim
- Joy Cheng
- et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paper
Publications
56 results for Joy Y. Cheng
Patterning sub-10 nm line patterns from a block copolymer hybrid
- Sang-Min Park
- Oun-Ho Park
- et al.
- 2008
- Nanotechnology
PaperOrientation control of block copolymer thin films
- Evelyn Auyeung
- Joy Y. Cheng
- et al.
- 2008
- ACS National Meeting 2008
Conference paperMultilayer magnetic antidot arrays from block copolymer templates
- V.P. Chuang
- W. Jung
- et al.
- 2008
- Journal of Applied Physics
PaperHigh-aspect-ratio cylindrical nanopore arrays and their use for templating titania nanoposts
- Oun-Ho Park
- Joy Y. Cheng
- et al.
- 2008
- Advanced Materials
PaperPhotopatternable nanoporous titania films by coassembly of diblock copolymer and chemically modified titanium alkoxide
- Oun-Ho Park
- Joy Y. Cheng
- et al.
- 2007
- ACS National Meeting 2007
Conference paperPolymer self assembly in semiconductor microelectronics
- Charles T. Black
- Ricardo Ruiz
- et al.
- 2007
- IBM J. Res. Dev
ReviewSelf-aligned, self-assembled organosilicate line patterns of ∼20nm half-pitch from block copolymer mediated self-assembly
- Ho-Cheol Kim
- Joy Cheng
- et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paperRapid directed self assembly of lamellar microdomains from a block copolymer containing hybrid
- Joy Y. Cheng
- Jed Pitera
- et al.
- 2007
- Applied Physics Letters
PaperFormation and photopatterning of nanoporous titania thin films
- Oun-Ho Park
- Joy Y. Cheng
- et al.
- 2007
- Applied Physics Letters
Paper