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- Ryan L. Burns
- Stephen C. Johnson
- et al.
- 2004
- Microlithography 2004
Conference paper
Publications
104 results for C. Grant Willson
Formation of deprotected fuzzy blobs in chemically amplified resists
- Ronald L. Jones
- Tengjiao Hu
- et al.
- 2004
- Journal of Polymer Science, Part B: Polymer Physics
PaperSynthesis and Properties of Diazopiperidiones for Use in Nonchemically Amplified Deep UV Photoresists
- Peter I. Tattersall
- David Breslin
- et al.
- 2004
- Chemistry of Materials
PaperDeprotection volume characteristics and line edge morphology in chemically amplified resists
- Ronald L. Jones
- Tengjiao Hu
- et al.
- 2003
- Microlithography 2003
Conference paperDiffusion induced line edge roughness
- Michael D. Stewart
- Gerard M. Schmid
- et al.
- 2003
- Microlithography 2003
Conference paperPolymeric liquid crystals: structural basis for ferroelectric and nonlinear optical properties
- R. Zentel
- H. Poths
- et al.
- 2003
- Polymers for Advanced Technologies
PaperSynthesis of Poly(p-hydroxy-α-methylstyrene) by Cationic Polymerization and Chemical Modification
- Hiroshi Ito
- C. Grant Willson
- et al.
- 2002
- Macromolecules
PaperCharacterization of a Novolac-Based Three-Component Deep-UV Resist
- Dennis R. McKean
- Scott A. MacDonald
- et al.
- 2002
- Chemistry of Materials
PaperA Positive Tone Plasma-Developable Resist Obtained by Gas-Phase Image Reversal
- Scott A. MacDonald
- Nicholas J. Clecak
- et al.
- 2002
- Chemistry of Materials
PaperPoly[p-(formyloxy)styrene]: Synthesis and Radiation-Induced Decarbonylation
- Jean M.J. Frechet
- Theodore G. Tessier
- et al.
- 2002
- Macromolecules
Paper