Nitridation of silicon in a multiwafer plasma system
- A. Reisman
- M. Berkenblit
- et al.
- 1984
- Journal of Electronic Materials
Paper
Publications
26 results for Melvin Berkenblit
Heat dissipation from silicon chips in a vertical plate, elevated pressure cold wall system
- A. Reisman
- M. Berkenblit
- et al.
- 1982
- Journal of Electronic Materials
PaperThe formation of ß SiC on Si
- M. Balog
- A. Reisman
- et al.
- 1980
- Journal of Electronic Materials
PaperThe use of differential thermal analysis for the examination of glasses
- A. Reisman
- M. Berkenblit
- et al.
- 1975
- Journal of Electronic Materials
PaperThermal forming of niobium oxide switchable resistors
- K.C. Park
- M. Berkenblit
- et al.
- 1973
- Journal of Electronic Materials
PaperThe epitaxial growth of ZnO on sapphire and MgAl spinel using the vapor phase reaction of Zn and H2O
- A. Reisman
- M. Berkenblit
- et al.
- 1973
- Journal of Electronic Materials
PaperThe equilibrium constant for the reaction of ZnO + H2 and the chemical vapor transport of zno via the Zn + H2O reaction
- A. Reisman
- M. Berkenblit
- et al.
- 1972
- Journal of Electronic Materials
PaperSmall area deposition of Ge on Ge or GaAs substrates via the disproportionation of GeI2
- M. Berkenblit
- A. Reisman
- 1971
- Metallurgical Transactions
PaperThe Chemical Polishing of Sapphire and MgAI Spinel
- A. Reisman
- M. Berkenblit
- et al.
- 1971
- JES
PaperA Method for the Synthesis of BI3 for Use as a Dopant Source
- M. Berkenblit
- A. Reisman
- 1970
- JES
Paper