Reactive etching mechanism of tungsten silicide in CF4-O2 plasma
- Young H. Lee
- Mao-Min Chen
- et al.
- 1984
- Thin Solid Films
Paper
Publications
61 results for K.Y. Ahn
Formation of an amorphous Rh-Si alloy by interfacial reaction between amorphous Si and crystalline Rh thin films
- S.R. Herd
- K.N. Tu
- et al.
- 1983
- Applied Physics Letters
PaperFabrication and testing of trilayers with a high deposition rate plasma-polymerized spacer
- N.J. Mazzeo
- K.Y. Ahn
- et al.
- 1983
- Thin Solid Films
PaperTransmission electron microscopy for optical storage material analysis
- S.R. Herd
- K.Y. Ahn
- 1983
- Thin Solid Films
PaperInvestigation of Tin films reactively sputtered using a sputter gun
- K.Y. Ahn
- M. Wittmer
- et al.
- 1983
- Thin Solid Films
PaperFormation and crystallization of amorphous silicides at the interface between thin metal and amorphous silicon films
- S.R. Herd
- K.Y. Ahn
- et al.
- 1983
- Thin Solid Films
PaperLaser writing on metal-silicon bilayers for optical storage. I. Optical properties
- K.Y. Ahn
- T.H. Di Stefano
- et al.
- 1982
- Journal of Applied Physics
PaperHigh-sensitivity silicide films for optical recording
- K.Y. Ahn
- T.H. Distefano
- et al.
- 1982
- Journal of Applied Physics
PaperStructural changes in Se-Te bilayers by laser writing
- S.R. Herd
- K.Y. Ahn
- et al.
- 1982
- Journal of Applied Physics
PaperLaser writing on silicon-metal bilayers for optical storage. II. Microscopic study
- S.R. Herd
- K.N. Tu
- et al.
- 1982
- Journal of Applied Physics
Paper