5×5 2D AFM cantilever arrays a first step towards a Terabit storage device
- M.I. Lutwyche
- C. Andreoli
- et al.
- 1999
- Sensors and Actuators, A: Physical
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Publications
104 results for Peter Vettiger
Ultrahigh-density atomic force microscopy data storage with erase capability
- G. Binnig
- M. Despont
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- 1999
- Applied Physics Letters
PaperNanomechanical nose
- H.P. Lang
- M.K. Baller
- et al.
- 1999
- MEMS 1999
Conference paperVLSI-NEMS chip for AFM data storage
- M. Despont
- J. Brugger
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- 1999
- MEMS 1999
Conference paperSU-8: A low-cost negative resist for MEMS
- H. Lorenz
- M. Despont
- et al.
- 1999
- JMM
PaperUltrahigh density, high-data-rate NEMS-based AFM data storage system
- P. Vettiger
- J. Brugger
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- 1999
- Microelectronic Engineering
PaperSoft, entirely photoplastic probes for scanning force microscopy
- G. Genolet
- J. Brugger
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- 1999
- Review of Scientific Instruments
PaperA chemical sensor based on amicromechanical cantilever array for the identification of gases and vapors
- H.P. Lang
- R. Berger
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- 1998
- Applied Physics A: Materials Science and Processing
PaperInstrumental aspects ofmagnetic resonance force microscopy
- P. Streckeisen
- S. Rast
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- 1998
- Applied Physics A: Materials Science and Processing
PaperLow-cost PDMS seal ring for single-side wet etching of MEMS structures
- J. Brugger
- G. Beljakovic
- et al.
- 1998
- Sensors and Actuators, A: Physical
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