Publications

159 results for F.M. D'Heurle

Influence of molybdenum on the formation of C54TiSi₂: Template phenomenon versus grain-size effect
- - S.-L. Zhang
  - F.M. D'Heurle
- 2000
- Applied Physics Letters
Paper
Reduction of electromigration in aluminum films by copper doping
- - Irving Ames
  - Francois M. D'Heurle
  - et al.
- 2000
- IBM J. Res. Dev
Paper
Phase formation and resistivity in the ternary system Ti-Nb-Si
- - Aliette Mouroux
  - Marylène Roux
  - et al.
- 1999
- Journal of Applied Physics
Paper
In situ characterization of titanium silicide formation: The effect of Mo interlayer, temperature ramp-rate, and annealing atmosphere
- - S.-L. Zhang
  - C. Lavoie
  - et al.
- 1999
- Journal of Applied Physics
Paper
Enhanced thermal stability of C49 TiSi₂ in the presence of aluminum
- - S.-L. Zhang
  - F.M. D'Heurle
  - et al.
- 1998
- Applied Physics Letters
Paper
Silicide interfaces in silicon technology
- - F.M. D'Heurle
- 1998
- Journal of Electronic Materials
Paper
Boron in polycrystalline Si_xGe_1-x films: Phase diagram and solid solubility
- - D. Mangelinck
  - P.-E. Hellberg
  - et al.
- 1998
- JES
Paper
Interdiffusion and phase formation in Cu(Sn) alloy films
- - L. Clevenger
  - B. Arcot
  - et al.
- 1998
- Journal of Applied Physics
Paper
Low temperature formation of C54-TiSi₂ using titanium alloys
- - C. Cabral Jr.
  - L. Clevenger
  - et al.
- 1997
- Applied Physics Letters
Paper
Oxidation of silicon-germanium alloys. I. An experimental study
- - P.-E. Hellberg
  - S.-L. Zhang
  - et al.
- 1997
- Journal of Applied Physics
Paper