Laser sputtering. Part I. On the existence of rapid laser sputtering at 193 nm
- Roger Kelly
- J.J. Cuomo
- et al.
- 1985
- Nuclear Inst. and Methods in Physics Research, B
Paper
Publications
108 results for J.J. Cuomo
Electron spectroscopy study of hydrogenated amorphous carbon films formed by methane ion beam deposition
- P. Oelhafen
- J. Freeouf
- et al.
- 1984
- Thin Solid Films
PaperSummary Abstract: A Quantitative Ion Beam Process Applied to the Deposition of Aluminum Nitride Thin Films
- J.M.E. Harper
- H.T.G. Hentzell
- et al.
- 1984
- JVSTA
PaperQuantitative ion beam process for the deposition of compound thin films
- J.M.E. Harper
- J.J. Cuomo
- et al.
- 1983
- Applied Physics Letters
PaperMULTICOMPONENT SPUTTER DEPOSITION UNDER ION BOMBARDMENT.
- J.J. Cuomo
- 1982
- ISIAT - IPAT 1982
Conference paperZrN diffusion barrier in aluminum metallization schemes
- L. Krusin-Elbaum
- M. Wittmer
- et al.
- 1983
- Thin Solid Films
PaperSummary Abstract: Developments in broad-beam ion source technology and applications
- H.R. Kaufman
- J.J. Cuomo
- 1983
- JVSTA
PaperOxidation processes using ion beams
- A.W. Kleinsasser
- J.M.E. Harper
- et al.
- 1982
- Thin Solid Films
PaperElectronic structure of amorphous Zr based alloys with V, Cr and Mn studied by photoelectron spectroscopy and bandstructure calculations
- P. Oelhafen
- V.L. Moruzzi
- et al.
- 1982
- Solid State Communications
PaperIon beam oxidation
- J.M.E. Harper
- M. Heiblum
- et al.
- 1981
- Journal of Applied Physics
Paper