Low temperature formation of C54-TiSi2 using titanium alloys
- C. Cabral Jr.
- L. Clevenger
- et al.
- 1997
- Applied Physics Letters
Paper
Publications
122 results for J.M.E. Harper
Surface roughening during titanium silicide formation: A comparison between Si(100) and poly-Si substrates
- C. Lavoie
- R. Martel
- et al.
- 1996
- MRS Fall Meeting 1996
Conference paperControl of in-plane texture of body centered cubic metal thin films
- J.M.E. Harper
- K.P. Rodbell
- et al.
- 1997
- Journal of Applied Physics
PaperCopper interconnect: Fabrication and reliability
- C.-K. Hu
- J.M.E. Harper
- 1997
- VLSI-TSA 1997
Conference paperIn-plane crystallographic texture of bcc metal thin films on amorphous substrates
- J.M.E. Harper
- K.P. Rodbell
- et al.
- 1997
- MRS Spring Meeting 1997
Conference paperCrystallographic texture of C54 titanium disilicide as a function of deep submicron structure geometry
- V. Svilan
- K.P. Rodbell
- et al.
- 1997
- Journal of Electronic Materials
PaperLowering the formation temperature of the C54-TiSi2 phase using a metallic interfacial layer
- C. Cabral Jr.
- L. Clevenger
- et al.
- 1997
- Journal of Materials Research
PaperMicrostructure control in semiconductor metallization
- J.M.E. Harper
- K.P. Rodbell
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
ReviewIn-situ X-ray diffraction analysis of TiSi2 phase formation from a titanium-molybdenum bilayer
- C. Cabral Jr.
- L. Clevenger
- et al.
- 1996
- MRS Fall Meeting 1996
Conference paperPhase formation in Cu(Sn) alloy thin films
- L. Clevenger
- B. Arcot
- et al.
- 1996
- MRS Spring Meeting 1996
Conference paper