Highly selective sputtering of silicon from TiSi2 at elevated temperature
- J.M.E. Harper
- S. Motakef
- et al.
- 1992
- Applied Physics Letters
Paper
Publications
122 results for J.M.E. Harper
Nondestructive detection of titanium disilicide phase transformation by picosecond ultrasonics
- H.-N. Lin
- R.J. Stoner
- et al.
- 1992
- Applied Physics Letters
PaperPreparation of low resistivity Cu-1 at. %Cr thin films by magnetron sputtering
- C. Cabral
- J.M.E. Harper
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperEnhanced sputtering of one species in the processing of multielement thin films
- S. Berg
- C. Nender
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paperStability of C49 and C54 phases of TiSi2 under ion bombardment
- S. Motakef
- J.M.E. Harper
- et al.
- 1991
- Journal of Applied Physics
PaperOn the formation of copper-rich copper silicides
- L. Stolt
- F.M. D'Heurle
- et al.
- 1991
- Thin Solid Films
PaperFormation of Cu3Si and its catalytic effect on silicon oxidation at room temperature
- L. Stolt
- A. Charai
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperChemical sputtering of Al2O3 by fluorine-containing plasmas excited by electron cyclotron resonance
- Y.H. Lee
- Z.H. Zhou
- et al.
- 1990
- Journal of Applied Physics
PaperRoom-temperature oxidation of silicon catalyzed by Cu3Si
- J.M.E. Harper
- A. Charai
- et al.
- 1990
- Applied Physics Letters
PaperPhotoemission from thin-film lanthanum hexaboride
- P.G. May
- R. Petkie
- et al.
- 1990
- Applied Physics Letters
Paper