Chromium mask damage in excimer laser projection processing
- J.T.C. Yeh
- 1989
- Proceedings of SPIE 1989
Conference paper
Publications
14467 results for Physical Sciences
Gel resist processing for submicron CMOS and bipolar circuits
- K.E. Petrillo
- M. Smyth
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperBench evaluation of lithographic lenses from measurements of the point spread function
- Norman Bobroff
- Petra Fadi
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperReply to comment on ground state of the strong-coupling Hubbard Hamiltonian: A numerical diagonalization study
- Efthimios Kaxiras
- Efstratios Manousakis
- 1989
- Physical Review B
PaperSurface structural and electronic properties of cleaved single crystals of Bi2.15Sr1.7CaCu2O8+ compounds: A scanning tunneling microscopy study
- C.K. Shih
- R.M. Feenstra
- et al.
- 1989
- Physical Review B
PaperBombardment-induced compositional change with alloys, oxides, oxysalts and halides III. The role of chemical driving forces
- R. Kelly
- 1989
- Materials Science and Engineering: A
PaperAntibonding surface state band of the Ge(111)2 × 1 surface
- J.M. Nicholls
- B. Reihl
- 1989
- Surface Science
PaperRaman scattering from superconducting gap excitations in Tl2Ca2Ba2Cu3O10 single crystals
- M. Krantz
- H. Rosen
- et al.
- 1989
- Physical Review B
PaperSoft vacuum pulsed electron beam processing of teflon and teflon-like films
- J. Krishnaswamy
- G.J. Collins
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperA double crystal multilayer x-ray monochromator
- L. Golub
- A. Quillen
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper