Chemical vapor deposition of gold
- Carl E. Larson
- Thomas H. Baum
- et al.
- 2019
- JES
Paper
Publications
14466 results for Physical Sciences
On the Temperature Dependence of Majority Carrier Transport in Heavily Arsenic-Doped Polycrystalline Silicon Thin Films
- John D. Cressler
- Wei Hwang
- et al.
- 2019
- JES
PaperElectrochemistry of Polysilanes with Bound Ferrocene
- Art Diaz
- Mark Seymour
- et al.
- 2019
- JES
PaperEffects of oxygen on the rie characteristics of aluminum films
- S.P. Holland
- Graham Olive
- et al.
- 2019
- JES
PaperA Study of silicon incorporation in GaAs MOCVD Layers
- E. Veuhoff
- T.F. Kuech
- et al.
- 2019
- JES
PaperShort Time Annealing
- T.O. Sedgwick
- 2019
- JES
PaperDiffusion of Ion-Implanted Arsenic in Thermally Grown SiO2Films
- D.R. Young
- H. Kräutle
- et al.
- 2019
- JES
PaperConducting Transition Metal Oxides: Possibilities for RuO2in VLSI Metallization
- L. Krusin-Elbaum
- M. Wittmer
- 2019
- JES
PaperPtSi Contact Metallurgy using Sputtered Pt and Different Annealing Processes
- H.-C.W. Huang
- B. Cunningham
- et al.
- 2019
- JES
PaperChemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures: I. Very Low Pressure Deposition
- James H. Comfort
- Rafael Reif
- 2019
- JES
Paper