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- Margaret A. Frisch
- 2004
- Surface and Interface Analysis
Paper
Publications
25371 results for Science
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- 2004
- Surface and Interface Analysis
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- 2004
- Surface and Interface Analysis
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- 2004
- Advanced Materials
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- 2004
- Advanced Materials
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- 2004
- SPIE IOPTO 2004
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- 2004
- SPIE IOPTO 2004
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- 2004
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Conference paperPreliminary evaluation of line edge roughness metrology based on CD-SAXS
- Ronald L. Jones
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- 2004
- SPIE Advanced Lithography 2004
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- J.Z. Sun
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- 2004
- SPIE IOPTO 2004
Conference paper