Publications

14466 results for Physical Sciences

Elimination of End-of-Range Shallow Junction Implantation Damage during CMOS Titanium Silicidation
- - G.A. Rozgonyi
- 2019
- JES
Paper
Mechanisms of Electroless Metal Plating II. Formaldehyde Oxidation
- - Perminder Bindra
  - Judith Roldan
- 2019
- JES
Paper
Oxide Passivation of Photochemically Unpinned GaAs
- - C.W. Wilmsen
  - Alan C. Warren
  - et al.
- 2019
- JES
Paper
In Situ X-Ray Absorption Study of Chromium Valency Changes in Passive Oxides on Sputtered ALC_r Thin Films Under Electrochemical Control
- - A.J. Davenport
  - H.S. Isaacs
  - et al.
- 2019
- JES
Paper
Vapor Phase Deposition of Palladium for Electroless Copper Plating
- - Richard R. Thomas
  - Jae M. Park
- 2019
- JES
Paper
Acceleration Factors for the Decomposition of Thermally Grown SiO₂ Films
- - S.I. Raider
- 2019
- JES
Paper
Low Energy X-Ray and Electron Damage to IGFET Gate Insulators
- - C.J. Merz
  - J.R. Maldonado
  - et al.
- 2019
- JES
Paper
Epitaxial Growth and Selectivity of AlxGa1-xAs Using Novel Metalorganic Precursors
- - M.S. Goorsky
  - T.F. Kuech
  - et al.
- 2019
- JES
Paper
Computer simulation of boron transport in magnetic czochralski growth of silicon
- - W.E. Langlois
- 2019
- JES
Paper
Plasma Etching of Silicon in SF₆: Experimental and Reactor Modeling Studies
- - Yeong-Jyh Lii
  - Jacob Jorné
  - et al.
- 2019
- JES
Paper