Dry etching damage of silicon: A review
- Gottlieb S. Oehrlein
- 1989
- Materials Science and Engineering B
Paper
Publications
14462 results for Physical Sciences
Hole concentration, Hall number, and disorder in compensation doped NdBa2Cu3Oy
- T. Penney
- M.W. Shafer
- et al.
- 1989
- Physica C: Superconductivity and its applications
PaperHot carrier cooling in GaSb: Bulk and quantum wells
- P.A. Snow
- D.J. Westland
- et al.
- 1989
- Superlattices and Microstructures
PaperMixed-metal-oxide planar optical waveguides
- G. Arjavalingam
- Michael A. Russak
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperTIN formed by ion beam nitriding of TiSi2
- S.E. Harnstrarn
- D. Moy
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperAbsolute depth profiling of thin film systems by low energy secondary neutral mass spectrometry
- A. Wucher
- H. Oechsner
- et al.
- 1989
- Thin Solid Films
PaperThe Influence of Velocity-Changing Collisions on Resonant Degenerate Four-Wave Mixing
- Elsa Garmire
- W.H. Richardson
- 1989
- IEEE JQE
PaperMicrowave studies of intergranular magnetic flux
- A.M. Portis
- K.W. Blazey
- 1989
- Cryogenics
PaperElectron spin resonance study of metal-nitride-silicon structures: Observation of Si dangling bonds with different configurations and trapping properties in silicon nitride
- D. Jousse
- Jerzy Kanicki
- et al.
- 1989
- Applied Surface Science
PaperTime resolved spectroscopy on etched GaAs/GaAlAs-quantum-microstructures
- G. Mayer
- B.E. Maile
- et al.
- 1989
- Superlattices and Microstructures
Paper