Thermally Developable, Positive Tone, Oxygen RIE Barrier Resist for Bilayer Lithography
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- Mitsuru Ueda
- et al.
- 2019
- JES
Paper
Publications
14458 results for Physical Sciences
Process Damage and Contamination Effects for Shallow Si Implanted GaAs
- H. Baratte
- A.J. Fleischman
- et al.
- 2019
- JES
PaperSelective dry etching of germanium with respect to silicon and vice versa
- G.S. Oehrlein
- T.D. Bestwick
- et al.
- 2019
- JES
PaperPtSi-Induced Junction Leakage
- J.P. Gambino
- M.D. Monkowski
- et al.
- 2019
- JES
PaperCorrosion of Thin Film Magnetic Disk: Galvanic Effects of the Carbon Overcoat
- D. Edmonson
- Michael A. Russak
- et al.
- 2019
- JES
PaperCorrosion Processes in Magneto-optic Films
- M.M. Farrow
- E.E. Marinero
- 2019
- JES
PaperSidewall Spacer Technology for MOS and Bipolar Devices
- Sang H. Dhong
- Edward J. Petrillo
- 2019
- JES
PaperThe Polycrystalline-Si Contact to GaAs
- P.D. Kirchner
- J.M. Woodall
- et al.
- 2019
- JES
PaperStripping Voltammetry of Nickel-Iron Films Electrodeposited on Platinum Using a Rotating Ring-Disk Electrode
- J. Tabib
- L. Romankiw
- 2019
- JES
PaperRefinement of Zinc Silicate Phosphor Synthesis
- I.F. Chong
- J.M. Brownlow
- et al.
- 2019
- JES
Paper